品牌:阿尔卡特 | 是否进口:否 | 产地:德国 |
加工定制:否 | 型号:AlcatelA604H | 电源电压:380V |
用途:真空泵维修 | 尺寸:334*224*667cm |
Adixen Alcatel A 604 H
上海阿尔卡特Adixen Alcatel A 604 H? ?阿尔卡特真空泵维修?
?宁波真空泵保养
阿尔卡特真空泵维修
Pfeiffer Adixen A 604 H A4 Series Semiconductor Dry Vacuum Pump - REBUILT
Pfeiffer Vacuum introduces the new A4 series. Harsh duty processes in semiconductor production always provide new challenges for vacuum pumps. Based on the proven and energy efficient multi-stage Roots technology, the A4 series offers a wide range of dry pump solutions, with different pumping speeds from 100 to 2,300 m3/h. Compared to previous process pumps, the corrosion and by-product condensation resistance have been increased significantly to address the latest requirements of 20 nm technology nodes and below. With an extended process lifetime - associated with a low power consumption - the A4 series pumps are counted among those with the lowest cost of ownership in the market.
Max. peak pumping speed - N2 | 560 m3/h |
Max. ultimate pressure (no purge) | 2 x 10-3?hPa |
Max. ultimate pressure (50 slm purge) | 6 x 10-3?hPa |
Max. continuous inlet flow at full rotational speed | 60 slm |
Power supply | 200–230 V / 380–480 V, 3-phase ± 10%, 50/60 Hz |
Power consumption at ultimate pressure - no exhaust heater? ?? | 2.0 kW |
Max. exhaust overpressure | 1,200 hPa |
Cooling water flow | 2.5 – 4 l/mn |
Cooling water temperature - subject to pump T° setting | 10 to 35°C |
Water connect | 3/8 NPT |
N2?purge flow | 10 to 120 slm |
Operating temperature | 5 to 40°C |
Inlet flange | DN 100 ***-K |
Exhaust flange | DN 40 ***-KF |
Dimensions | 962 x 388 x 775 mm |
Weight | 370 kg |
Max. vibration level at pump inlet flange | <0.1 g / 1.5 mm/s |
Max. noise level at ultimate pressure | <68 db(a) |
Digital Manuals
RFQ/Configuration
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